Refurbishment Business (AMAT)

Summary list for Refurbishment, Modification, Relocation & Upgrade

● PRECISION-5000 : DLH / DxZ, PE-CVD / SA CVD / SiON / TEOS, WCVD, MxP Poly etc.

● ENDURA 5500 : STD HTHU, Aluminum, TiN, PCII / RPC, IMP/Encore, TxZ (STD, HP, HP+), MOCVD etc.

● CENTURA : HDP, WxZ, PE CVD, CxZ, Gigafill SACVD, DxZ Top Mount RPS etc.

● Ultima : HDP, Ultima Plus / TE, Uitima-X;

● CENTURA 5200 RTP (ETCH): MOD I, XE (MOD II), XE Plus, ISSG, RPN etc.

● CENTURA (ETCH):MXP Ploy, DPS R1 Metal, Super E, DPS + Poly, DPS + Metal, DPS II Metal etc.

● PRODUCER GT: F-CVD, PE SiN, BPSG; SE : HT-SiN, PE CVD, LT/HT ACL, HARP USG etc.