AMAT CVD & ETCH System
AMAT CVD & ETCH System
| AMAT Centura 5200 ETCH |
CHAMBER SOLUTION
☐ ※ Super E Chamber
☐ ※ DPS + Poly Chamber
☐ ※ DPS R1 Metal Chamber
☐ ※ DPS II Metal Chamber
☐ ※ DPS + Metal Chamber
| AMAT Producer |
CHAMBER SOLUTION
※ GT Avila : F-CVD, PE SiN, BPSG Chamber
※ SE : Hi-SiN, PE CVD, LT/HT ACL Chamber
HARP USG Chamber
