零件耗材
搬運設備平台，PI型ESC可用於多種用途搬運需求。
▲ 靜電吸盤應
1、 Cell真空貼合作業 (面板業大板貼合)
2、真空鍍膜
3、基板搬運
4、金屬箔片搬運作業
5、AOI檢測設備
6、軟性材料搬運
7、多孔性材料搬運
▲ 使用靜電吸盤的優勢
1、為整接觸面吸附，可吸附鏤空箔板
2、使用靜電力吸附，可在真空環境下使用
3、傳統機械夾持邊緣會有夾痕，靜電吸槃無此問題
4、吸附力均勻穩定，不會造成產品傷害
5、堆棧後的產品只有第一個接觸的產品會被吸附
標準型
抗刮強度加強型
因各種不同產品或製程上需求，針對各種功能加強設計，我司PI型靜電吸盤，可分為三大類型可供選擇
1、標準型 (PS01)
特點：通用型靜電吸盤，同時兼顧吸附力與表面強度
應用：乾淨的環境，無產品粉塵碎屑的情況
2、抗刮強度加強型 (PS02)
特點：表面強度加強，犧牲部分吸力，但可藉由高電壓補回
應用：環境潔淨度不足者或產品容易刮傷靜電吸盤者，此型態
可以增加靜電吸盤之壽命
3、吸力加強型 (PS03)
特點：最大化吸附力
應用：部份特殊材料或高絕緣性材料
Alumina [Al2O3]
Competitiveness
ㆍ Accumulated Know-How of
processing technology
ㆍ Make the variety structure of
molding method
(CIP, Slip Casting)
ㆍ Having the largest gas chamber
in Korea (6.3 Nm3)
Silicon [Si]
Competitiveness
ㆍ Raw price competitiveness
advantage through obtaining stable
supply of raw material and
Independent sintering technology
ㆍ Produce Capa. Up : Excellent response
of urgent delivery date
ㆍ Accumulated Know-How (Cathode)
Silicon Carbide [SiC]
Competitiveness
ㆍ It has been stabilized in high
temperatures, heat conduction and
high strength
ㆍ High purity performance by CVD
coating Increased corrosion resistance to
most acidic solution
Quartz
Competitiveness
ㆍ It has high purity material property
ㆍ It has superior electric insulation
ability
ㆍ It has low gas content and superior
specific heat and specific conductivity
Yttria[Y2O3]
Competitiveness
ㆍ high thermal shock resistance
ㆍ low Particle Issue during process
ㆍ Excellence plasma resistance
AlN [Aluminum Nitride]
Competitiveness
ㆍ High thermal conductivity/
thermal shock resistivity
ㆍ Low coefficient of thermal expansion
ㆍ Strong corrosion resistance for fluorine
and chlorine gas
